HOME > Silicon wafer  
 
CZ Wafer
 
  Diameter
  2" , 3" , 4" , 5" , 6" , 8" , 12"
  Grade
  Prime, Test, Mechanical, Dummy, Rejected
  Type   P ( Boron ) N ( Phosphorous, Antimony, Arsenic )
  Orientation   <1-0-0 > <1-1-0> <1-1-1>
  Resistivity   0.001 ~ 100 ohm.cm
  Thckness   SEMI- standard
  Surface   Single side polishing, Double side polishing, Lapped, Etched
  Back side   Etched, Polished, Lapped
  Flat   Primary Flat , Secondary Flat
 
FZ Wafer ( High Resistivity )
 
PFZ product sheet
  PFZ
  Premium Float Zone : Float Zone Silicon primarily for power and detector applications
NTD product sheet
  NTD   Neutron Transmutation Doped (NTD) Silicon for Power Applications
HPS product sheet
  HPS
  High Purity Silicon (HPS) primarily for Detector Applications
HiRes product sheet
  HiRes¢â   Topsil is introducing HiRes¢â silicon for emerging GHz communication platforms:
PV-FZ product sheet
  PV-FZ¢â   Topsil provides PV-FZ¢â silicon material, the ideal substrate for the next generation of high efficient and cost effective solar cell modules.
HiTran product sheet
  HiTran¢â
  High Transmission Silicon for Infrared applications
MEMS wafers product sheet
  MEMS wafers   Topsil is selling silicon wafers for emerging MEMS device platforms
 
Wafer service ( Blanket wafer , Coating service )
 
  Diameter
  4" to 12 "  
  Thickness
  Customer requesting thickness, Ultra Thin, Thick.
Double side polished, Signle side polished.
  Film Deposition   Thermal oxide Wet type and Dry type
      LPCVD Poly silicon, TEOS, Nitride, ETC.
      PVD W, Au, Cu, Ta, Ti, TaN, TiN
 
CMP Patterned wafer
 
Wafer Type Mask Features
 
Dielectric
SKW 1-1 150mm
  SKW1 200mm
  SKW7-2 200mm
  SKW 7-2HSH 200mm
 
  Wafer Type Mask Features
 
STI
SKW3-2 HDP CVD oxide film
  SKW3-5 HDP CVD oxide film/ defectivity
  SKW3-6 HDP CVD oxide film planarity & defectivity evaluation
 
  Wafer Type Mask Features
 
W
SKW5-2  
  SKW5-3 Single damascene structure
  SKW5PA (RAM 7) Plug patterned [plug size (0.2µm)]
  SKW5PB (RAM 7) Plug patterned [plug size (0.15µm)]
  SKW5-J085 Plug patterned [plug size (0.16µm)] for 90nm technology node
  SKW 5-ICP-A (ATR30) 90nm technology
  SKW 5-ICP-B (K194) 90nm technology
 
Wafer Type Mask Features
 
Poly Si
SKW3AS 200mm
  SKW3PS 200mm
  SKW3PN 200mm
  SKW3DPS New! 200mm
 
  Wafer Type Mask Features
 
Cu
SKW 6(C)-3.18 TEOS  
  SKW 6(L)-3.18 BD  
  SKW 6(L)-3.18 TEOS  
  SKW 6-3.13 BD New! 90nm technology node
  SKW 6-3.18 TN BD New!  
  SKW 6-3.13 TEOS New! 90nm technology node
  SKW 6-3.18 TN TEOS  
  SKW 6-3.13 BD/SiON 90nm technology node
  SKW 6-3.18 TN BD/SiON  
  SKW 6-5 BD 90nm technology node
  SKW 6-5 TEOS 90nm technology node
  SKW 6-5 BD/SiON 90nm technology node
 
  Wafer Type Mask Features
 
300mm
SKW 7-2 New!  
  SKW 3-2 New!  
  SKW 3-2 C-6700-HDP New!  
  SKW 3-5 New! Defectivity evaluation
  SKW 3-6 New! Planarity and defectivity evaluation
  SKW 5-3 New!  
  SKW 6-3 BD New! Cu/Low-k
  SKW 6-3 CORAL New! Cu/Low-k
  SKW 6-3 TEOS New!  
  SKW3-764ETC303 New! STI CMP Evaluation
 
SOI Wafer
 
  Bonded SOI wafer
    Data Sheet
 
  Application  
      SOI solutions for MEMS/MST
      RF MEMS and RF PIN diodes  
      Optoelectronics / micro-mirrors
      Smart power
      Solid State Relays
      Integrated sensors
      Advanced analog ICs
  SIMOX      
  Customised Substrate Design
 
Solar wafers
 
PV-FZ , Solar wafers, Solar cells, M-CZ, HEM, Polycrystalline Photovoltaic Modules
 
Other wafers
 
EPI, GaAs, Ge, InP Glass, Quartz, Pyrex, Sapphire